Title:
LATERAL TYPE VACUUM EVAPORATION SOURCE AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/146232
Kind Code:
A1
Abstract:
Provided is a lateral type vacuum evaporation source comprising a rear heater disposed at a rear surface of a crucible in order to uniformly apply a temperature to an evaporation material inside the crucible. The lateral type vacuum evaporation source comprises: a crucible in which an evaporation material moves, including a rear surface and a side wall elongated from the rear surface in a first direction; a boat disposed in the crucible and accommodating the evaporation material; a side wall heater disposed along the side wall of the crucible; and a rear heater disposed spaced apart from the crucible in the first direction.
Inventors:
KIM HEE CHEOL (KR)
HAN SUNG KWAN (KR)
JUNG JAE HUN (KR)
KIM GUN WOO (KR)
MOON IL KWON (KR)
EUM PU REUN BYUL (KR)
CHOI YONG HUI (KR)
HAN SUNG KWAN (KR)
JUNG JAE HUN (KR)
KIM GUN WOO (KR)
MOON IL KWON (KR)
EUM PU REUN BYUL (KR)
CHOI YONG HUI (KR)
Application Number:
PCT/KR2023/001042
Publication Date:
August 03, 2023
Filing Date:
January 20, 2023
Export Citation:
Assignee:
ALPHA PLUS CO LTD (KR)
International Classes:
C23C14/24; H10K71/16
Foreign References:
| JP2011052301A | 2011-03-17 | |||
| KR100889760B1 | 2009-03-20 | |||
| KR20190098536A | 2019-08-22 | |||
| KR950027006A | ||||
| KR100729097B1 | 2007-06-14 |
Attorney, Agent or Firm:
KASAN IP & LAW FIRM (KR)
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