Title:
LASER DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/047867
Kind Code:
A1
Abstract:
A laser device comprising a pair of electrodes that generate discharge and an optical pulse extending device that extends the pulse width of pulse laser light generated by the discharge generated between the electrodes, wherein the optical pulse extending device comprises: a beam splitter including an optical surface which the pulse laser light is incident on and is disposed so as to be inclined with respect to the optical path axis of the pulse laser light and splitting the pulse laser light that has entered the optical surface into reflected laser light and transmitted laser light; a plurality of mirrors which guide the reflected laser light to the beam splitter; and a sliding mechanism which moves the beam splitter in a direction perpendicular to the direction of the discharge and parallel to the optical surface.
Inventors:
KOUZAI KEITA (JP)
YASHIRO MASANORI (JP)
YASHIRO MASANORI (JP)
Application Number:
PCT/JP2022/033128
Publication Date:
March 07, 2024
Filing Date:
September 02, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/134
Domestic Patent References:
| WO2019229823A1 | 2019-12-05 | |||
| WO2004095661A1 | 2004-11-04 |
Foreign References:
| JP2009076906A | 2009-04-09 | |||
| JPH09288251A | 1997-11-04 | |||
| JP2019004121A | 2019-01-10 | |||
| US20190004218A1 | 2019-01-03 | |||
| US20130148185A1 | 2013-06-13 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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