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Title:
JIG
Document Type and Number:
WIPO Patent Application WO/2021/106304
Kind Code:
A1
Abstract:
This jig (30) comprises: a first block part (100) on which a probe head (300) is installed; and a first suction opening (112) formed in the first block part (100). Air present on the side, in which one end of a probe (330) provided to the probe head (300) is positioned, is suctioned from the first suction opening (112).

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Inventors:
HOSOKAWA DAISUKE (JP)
KOBAYASHI SHUNSUKE (JP)
KAWAMURA KEN (JP)
Application Number:
PCT/JP2020/033792
Publication Date:
June 03, 2021
Filing Date:
September 07, 2020
Export Citation:
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Assignee:
YOKOWO SEISAKUSHO KK (JP)
International Classes:
H01L21/66; G01R1/073; G01R31/26; G01R31/28
Domestic Patent References:
WO2012023180A12012-02-23
Foreign References:
JP2011089891A2011-05-06
JP2003507882A2003-02-25
JP2012163529A2012-08-30
JP2018067603A2018-04-26
US6369593B12002-04-09
Attorney, Agent or Firm:
HAYAMI Shinji et al. (JP)
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