Title:
INSPECTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/009454
Kind Code:
A1
Abstract:
An inspection apparatus for inspecting a sample having a surface formed by a transparent film and an opaque substance, the apparatus comprising: a first optical unit that condenses first reflected light obtained as a result of illumination light, emitted from a light source, being reflected on the sample; a second optical unit that condenses second reflected light obtained as a result of the illumination light being emitted toward and reflected by a reflection mirror; an optical interference unit that causes the first reflected light and the second reflected light to interfere with each other to obtain interference light; a plurality of interference light sensors that detect the reflected light intensity of the interference light; and a signal-processing device that processes the amount of light detected by the interference light sensors, wherein the signal-processing device determines whether a given coordinate point of the sample is in the transparent film or in the opaque substance, on the basis of the amount of light detected by the interference light sensors and the refractive indexes of the transparent film and the opaque substance, and measures the surface height or the thickness of the sample at the coordinate point.
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Inventors:
HONDA TOSHIFUMI (JP)
Application Number:
PCT/JP2022/026959
Publication Date:
January 11, 2024
Filing Date:
July 07, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01B11/02; G01B11/06
Foreign References:
| JP2009020448A | 2009-01-29 | |||
| JPH0571923A | 1993-03-23 | |||
| JP2012073204A | 2012-04-12 |
Attorney, Agent or Firm:
KAICHI IP (JP)
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