Title:
INFRARED SENSOR AND INFRARED SENSOR ARRAY
Document Type and Number:
WIPO Patent Application WO/2020/174732
Kind Code:
A1
Abstract:
Provided in the present disclosure is technology that further increases the sensitivity of an infrared sensor. The infrared sensor according to the present disclosure comprises: a base substrate; an infrared light-receiving part; a first beam; a second beam; a first wiring; a second wiring; and an infrared reflecting film. Each of the first beam and the second beam comprises a connection part connected to the base substrate and/or a member on the base substrate, and an estranged part that is estranged from the base substrate, the first and second beam being physically connected to the infrared light-receiving part by the estranged parts. The infrared light-receiving part is supported, by the first beam and the second beam, so as to be estranged from the base substrate, and comprises a lower electrode, an upper electrode and a resistance change film. The resistance change film is sandwiched, in the thickness direction, by the lower electrode and the upper electrode, the lower electrode and the upper electrode are each electrically connected to the resistance change film, the lower electrode and the upper electrode are electrically connected to the first wiring and the second wiring, respectively, at least one electrode among the lower electrode and the upper electrode has a line and space structure, and the infrared reflecting film is provided in a location, within the base substrate surface, facing the infrared light-receiving part.
Inventors:
TAKAHASHI KOUHEI
TAMBO NAOKI
NAKAMURA KUNIHIKO
FUJIKANE MASAKI
NAITO YASUYUKI
TAMBO NAOKI
NAKAMURA KUNIHIKO
FUJIKANE MASAKI
NAITO YASUYUKI
Application Number:
PCT/JP2019/037205
Publication Date:
September 03, 2020
Filing Date:
September 24, 2019
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01J1/02; H01L27/144; H01L37/00
Foreign References:
| JP2008003081A | 2008-01-10 | |||
| JPH0915039A | 1997-01-17 | |||
| JP2001272271A | 2001-10-05 | |||
| JP2008082790A | 2008-04-10 | |||
| JPH08201177A | 1996-08-09 | |||
| JP2017223644A | 2017-12-21 | |||
| US5912464A | 1999-06-15 | |||
| JP2017223644A | 2017-12-21 |
Other References:
A. KOSAREV ET AL.: "Un-cooled Micro-bolometer with Sandwiched Thermo-sensing Layer Based on Ge Films Deposited by Plasma", MATER. RES. SOC. SYMP. PROC., vol. 910, 2006
See also references of EP 3933357A4
See also references of EP 3933357A4
Attorney, Agent or Firm:
KAMATA Kenji et al. (JP)
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