Title:
IMPRINTING DEVICE AND IMPRINTING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/055086
Kind Code:
A1
Abstract:
An imprinting device applies pressure between a master substrate and a polymer film to transfer a pattern formed on the master substrate to the polymer film. The imprinting device includes a plurality of coils, and the surface of the master substrate is heated by an electromagnetic field induced by the plurality of coils. Through-holes are defined in each of the plurality of coils, and support rods are inserted into the through-holes. The positions of the plurality of coils are changed to correspond to the master substrate.
Inventors:
SEO JEE-HOON (KR)
YOO KUM-PYO (KR)
YI YU HEON (KR)
YOO KUM-PYO (KR)
YI YU HEON (KR)
Application Number:
PCT/KR2019/011685
Publication Date:
March 19, 2020
Filing Date:
September 10, 2019
Export Citation:
Assignee:
ITED INC (KR)
International Classes:
G03F7/00; G03F9/00; H01L21/027
Foreign References:
| KR100885670B1 | 2009-02-25 | |||
| KR100755235B1 | 2007-09-05 | |||
| KR20080085510A | 2008-09-24 | |||
| KR20030083644A | 2003-10-30 | |||
| KR20170023620A | 2017-03-06 |
Attorney, Agent or Firm:
HAEAN PATENT & LAW FIRM (KR)
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