Title:
IMMERSION FLUID RECOVERY SYSTEM AND IMMERSION FLUID RECOVERY METHOD USING SAID SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/088218
Kind Code:
A1
Abstract:
An immersion fluid recovery system and an immersion fluid recovery method using said system. The system comprises a recovery cavity (61), a sealed extraction opening (6), a recovery flow path (63), a gas-liquid separator (64), and an orifice plate (67); the sealed extraction opening (6) and the recovery cavity (61) are arranged at a terminal objective lens (1) and are located in an immersion fluid supply and recovery apparatus (3) above a substrate (2); the sealed extraction opening (6) is located in the immersion fluid supply and recovery apparatus (3) and is oriented toward the substrate (2), the sealed extraction opening (6) extracts immersion fluid from a gap between the immersion fluid supply and recovery apparatus (3) and the substrate (2), and also extracts a gas (GS) from said gap at an axial direction outer side of the immersion fluid; the recovery cavity is located within the immersion fluid supply and recovery apparatus (3) and is in communication with the sealed extraction opening (6); the recovery cavity (61) is in communication with an accommodation cavity of the gas-liquid separator (64); the orifice plate (67) is arranged in the recovery flow path (63), the orifice plate (67) has a through hole (671) along a fluid flow direction, and the size of the diameter of the through hole (671) is less than the size of the inner diameter of a recovery pipe of the recovery flow path (63) where the orifice plate (67) is located. The present method is able to effectively consume fluid circumfluence so as to consume pressure pulsation energy, weaken gas-liquid impact, and prevent pressure pulsation in the recovery flow path (63) from being amplified by resonance.
Inventors:
FU XIN (CN)
CHI YOUYANG (CN)
WU MIN (CN)
LI YUAN (CN)
TONG JINJIE (CN)
DU LIANG (CN)
XU NING (CN)
CHEN WENYU (CN)
CHI YOUYANG (CN)
WU MIN (CN)
LI YUAN (CN)
TONG JINJIE (CN)
DU LIANG (CN)
XU NING (CN)
CHEN WENYU (CN)
Application Number:
PCT/CN2020/126651
Publication Date:
May 05, 2022
Filing Date:
November 05, 2020
Export Citation:
Assignee:
ZHEJIANG CHEER TECH CO LTD (CN)
International Classes:
G03F7/20; B01D61/18; G02B21/00; G03B27/52; H01L21/027
Foreign References:
| CN101762986A | 2010-06-30 | |||
| CN104919078A | 2015-09-16 | |||
| CN101477314A | 2009-07-08 | |||
| CN1839333A | 2006-09-27 | |||
| CN107561867A | 2018-01-09 | |||
| CN110327780A | 2019-10-15 | |||
| CN104487897A | 2015-04-01 | |||
| CN102918630A | 2013-02-06 | |||
| CN110354685A | 2019-10-22 | |||
| US20120013862A1 | 2012-01-19 | |||
| JP2010098172A | 2010-04-30 |
Attorney, Agent or Firm:
HANGZHOU SIKERUI PATENT OFFICE CO., LTD (CN)
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