HIGH QUALITY QUANTUM COMPUTER COMPONENTS

Title:

HIGH QUALITY QUANTUM COMPUTER COMPONENTS

Document Type and Number:

WIPO Patent Application WO/2024/019774

Kind Code:

A3

Abstract:

Exemplary methods of fabricating high quality quantum computing components are described. The methods include removing native oxide from a deposition surface of a silicon substrate in a cleaning chamber of a processing system, and transferring the silicon substrate under vacuum to a deposition chamber of the processing system. The methods further include depositing an aluminum layer on the deposition surface of the silicon substrate in the deposition chamber, where an interface between the aluminum layer and the deposition surface of the silicon substrate is oxygen free.

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Inventors:

YANG ZIHAO (US)
ZHU MINGWEI (US)
YU LAN (US)
VISSER ROBERT JAN (US)
PATIBANDLA NAG (US)

Application Number:

PCT/US2023/012718

Publication Date:

April 25, 2024

Filing Date:

February 09, 2023

Export Citation:

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Assignee:

APPLIED MATERIALS INC (US)

International Classes:

H01L21/02; H01L21/67

Attorney, Agent or Firm:

CAMPBELL, Quinten (US)

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