Title:
GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/024779
Kind Code:
A1
Abstract:
This generation device comprises: a plasma generation tube of which at least the surface is provided with a dielectric material; an antenna which includes a liner conductor and a dielectric material that is applied on the conductor; a high frequency power supply connected to the antenna; and a gas supply unit which supplies, inside the plasma generation tube, a gas for generating radicals or ions. The antenna is disposed while extending near another end of the plasma generation tube, and is disposed in a groove formed on an inner surface in an axis direction in at least a portion from one end of the plasma generation tube to near the other end, and is disposed in a groove formed on the inner surface in a circumferential direction in at least a portion near the other end of the plasma generation tube.
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Inventors:
HORI MASARU (JP)
ODA OSAMU (JP)
ODA OSAMU (JP)
Application Number:
PCT/JP2023/027171
Publication Date:
February 01, 2024
Filing Date:
July 25, 2023
Export Citation:
Assignee:
NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (JP)
International Classes:
H05H1/30; C23C16/505; C30B25/02
Domestic Patent References:
| WO2016136669A1 | 2016-09-01 |
Foreign References:
| JP2007207477A | 2007-08-16 | |||
| JP2000282243A | 2000-10-10 | |||
| JP2007213822A | 2007-08-23 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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