Title:
GATE VALVE SYSTEM AND CONTROL METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/240516
Kind Code:
A2
Abstract:
Embodiments of the present invention provide a gate valve comprising: a sealing plate for opening/closing a chamber; a support part connected to the sealing plate; a driving part for vertically moving the support part; a valve housing having the sealing plate and the support part therein and having a passage and a replacement part; a first sealing member for sealing the passage by means of the movement of the sealing plate; and a second sealing member for sealing the replacement part by means of the movement of the sealing plate, wherein the driving part moves the sealing plate to the location corresponding to the passage or the replacement part. Thus, the moving distance of the sealing plate is minimized such that the gate valve operate reliably, manufacturing costs thereof are reduced, movement time of the sealing plate can be saved and the space of the gate valve can be saved.
Inventors:
CHOI DAI KYU (KR)
Application Number:
PCT/KR2019/007163
Publication Date:
December 19, 2019
Filing Date:
June 13, 2019
Export Citation:
Assignee:
NP HOLDINGS CO LTD (KR)
International Classes:
H01L21/677; F16K3/02; F16K3/18; F16K3/314; F16K3/316; F16K27/04; F16K49/00; H01L21/67
Attorney, Agent or Firm:
KIM, Nam Sik et al. (KR)
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