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Title:
FORMING OPTICAL DEVICE USING MIXED-PARTICLE LAYER
Document Type and Number:
WIPO Patent Application WO/2024/006104
Kind Code:
A4
Abstract:
A method of forming an optical device is provided. The method includes forming a first layer over a plurality of optical structures, the first layer including a first plurality of nanoparticles and a second plurality of nanoparticles. The first plurality of nanoparticles and the second plurality of nanoparticles are formed of a first material, the first plurality of nanoparticles have a first average volume, greater than 95% of the first plurality of nanoparticles have a volume within 10% of the first average volume, the second plurality of nanoparticles have a second average volume, greater than 95% of the second plurality of nanoparticles have a volume within 10% of the second average volume, and the second average volume is at least 25% larger the first average volume.

Inventors:
LUO YINGDONG (US)
DENG XIAOPEI (US)
HOURANI RAMI (US)
GODET LUDOVIC (US)
Application Number:
PCT/US2023/025664
Publication Date:
April 25, 2024
Filing Date:
June 19, 2023
Export Citation:
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Assignee:
APPLIED MATERIALS INC (US)
International Classes:
G02F1/01; B41J2/01; G02B27/01
Attorney, Agent or Firm:
PATTERSON, B. Todd et al. (US)
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Claims:
AMENDED CLAIMS received by the International Bureau on 08 March 2024 (08.03.2024)

[Claim 1] A method of forming an optical device comprising: forming a first layer over a plurality of optical structures, the first layer including a first plurality of nanoparticles and a second plurality of nanoparticles, wherein the first plurality of nanoparticles have a first average volume, greater than 95% of the first plurality of nanoparticles have a volume within 10% of the first average volume, the second plurality of nanoparticles have a second average volume, greater than 95% of the second plurality of nanoparticles have a volume within 10% of the second average volume, and the second average volume is at least 25% larger the first average volume.

[Claim 2] The method of claim 1, wherein the first plurality of nanoparticles and the second plurality of nanoparticles are formed of a first material, and the first plurality of nanoparticles and the second plurality of nanoparticles comprises greater than 95% of the total nanoparticles formed of the first material in the first layer.

[Claim 3] The method of claim 1, wherein the first layer is formed by depositing a mixture that includes the first plurality of nanoparticles and the second plurality of nanoparticles.

[Claim 4] The method of claim 1, wherein the second average volume is at least two times the first average volume.

[Claim 5] The method of claim 1, wherein the second average volume is at least five times the first average volume.

[Claim 6] The method of claim 1, wherein the first layer is formed using an inkjet process.

[Claim 7] The method of claim 1, wherein the first plurality of nanoparticles and the second plurality of nanoparticles are formed an oxide.

[Claim 8] A method of forming an optical device comprising: forming a first layer over and between a plurality of optical structures, the first layer including a first plurality of nanoparticles and a second plurality of nanoparticles, wherein the first plurality of optical device structures have a sub-micron width in a first direction, the first plurality of optical device structures are spaced apart from each

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AMENDED SHEET (ARTICLE 19) other in the first direction, the first plurality of nanoparticles are formed of a first material and the second plurality of nanoparticles are formed of a second material, and the first plurality of nanoparticles and the second plurality of nanoparticles comprise greater than 95% of optically transparent nanoparticles in the first layer.

[Claim 9] The method of claim 8, wherein the first material and the second material are formed of a same one or more chemical elements, and the first material has a different chemical composition than the second material.

[Claim 10] The method of claim 8, wherein the second material includes at least one chemical element other than one or more chemical elements included in the first material.

[Claim 11] The method of claim 8, wherein the first material consists of one or more chemical elements, and the second material consists of one or more chemical elements that are each different from the one or more chemical elements that form the first material.

[Claim 12] The method of claim 8, wherein forming the first layer comprises curing a mixture that includes the first plurality of nanoparticles and the second plurality of nanoparticles after the mixture is deposited over the plurality of optical structures.

[Claim 13] The method of claim 8, wherein the first layer is formed by depositing a mixture that includes the first plurality of nanoparticles and the second plurality of nanoparticles.

[Claim 14] The method of claim 8, wherein the first layer is formed using an inkjet process.

[Claim 15] A method of forming an optical device comprising: forming a first layer over and between a plurality of optical structures, the first layer including a first plurality of nanoparticles and a second plurality of nanoparticles, wherein the first plurality of optical device structures have a sub-micron width in a first direction, the first plurality of optical device structures are spaced apart from each other in the first direction, the first plurality of nanoparticles have a different geometry than the second plurality of nanoparticles, and

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AMENDED SHEET (ARTICLE 19) the first plurality of nanoparticles and the second plurality of nanoparticles comprise greater than 95% of optically transparent nanoparticles in the first layer.

[Claim 16] The method of claim 15, wherein forming the first layer comprises curing a mixture that includes the first plurality of nanoparticles and the second plurality of nanoparticles after the mixture is deposited over the plurality of optical structures.

[Claim 17] The method of claim 15, wherein the first layer is formed by depositing a mixture that includes the first plurality of nanoparticles and the second plurality of nanoparticles.

[Claim 18] The method of claim 15, wherein the first layer is formed using an inkjet process.

[Claim 19] The method of claim 15, wherein the first plurality of nanoparticles are formed of a rutile phase of titanium oxide, and the second plurality of nanoparticles are formed of an anatase phase of titanium oxide.

[Claim 20] The method of claim 15, wherein the first plurality of nanoparticles have a crystalline structure and the second plurality of nanoparticles have an amorphous structure.

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AMENDED SHEET (ARTICLE 19)