Title:
FLUID SUPPLY MECHANISM AND FLUID SUPPLY METHOD
Document Type and Number:
WIPO Patent Application WO/2024/080020
Kind Code:
A1
Abstract:
Provided is a fluid supply mechanism 100 that repeatedly supplies and stops supply of a fluid to a chamber CH, the fluid supply mechanism 100 comprising: a fluid supply path L1 that communicates with the chamber 100; a tank T provided to the fluid supply path L1, the fluid being introduced into the tank T; and a downstream-side valve Vd provided on the downstream side of the tank T in the fluid supply path. The internal volume of the tank T changes due to deformation.
More Like This:
| WO/1980/002634 | FEEDING APPARATUS ESPECIALLY FOR CATTLE |
| JP2002306951 | CHEMICAL LIQUID INJECTOR |
| WO/2024/006205 | VIBRATION FILL PROCESS FOR SOLID CHEMISTRIES |
Inventors:
YADA HIDETAKA (JP)
NISHIWAKI KEISUKE (JP)
NISHIWAKI KEISUKE (JP)
Application Number:
PCT/JP2023/031488
Publication Date:
April 18, 2024
Filing Date:
August 30, 2023
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
B01J4/00; H01L21/205; H01L21/31
Foreign References:
| JP2006184989A | 2006-07-13 | |||
| JP2003184734A | 2003-07-03 | |||
| JP2013191843A | 2013-09-26 | |||
| CN110931391A | 2020-03-27 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei et al. (JP)
Download PDF:
Previous Patent: TERMINAL AND COMMUNICATION METHOD
Next Patent: CAPACITOR, CAPACITOR BANK, AND OUTER CASE FOR CAPACITOR
Next Patent: CAPACITOR, CAPACITOR BANK, AND OUTER CASE FOR CAPACITOR