Title:
FLUID SHUT-OFF VALVE
Document Type and Number:
WIPO Patent Application WO/2021/215767
Kind Code:
A1
Abstract:
Disclosed is a fluid shut-off valve comprising: a valve housing having a fluid channel, which is formed between an upper housing hole and a lower housing hole and has a fluid flowing therein, and an accommodation space which is formed on one side of the fluid channel and is connected to the fluid channel; a shut-off module positioned in an atmosphere position in the accommodation space and having a shut-off plate which moves to a shut-off position of the fluid channel to shut off the fluid channel; and a cleaning gas injection module for injecting a cleaning gas on the upper surface of the shut-off plate positioned in the shut-off position.
Inventors:
SHIN GYEONG SOON (KR)
Application Number:
PCT/KR2021/004890
Publication Date:
October 28, 2021
Filing Date:
April 19, 2021
Export Citation:
Assignee:
SHIN GYEONG SOON (KR)
International Classes:
H01L21/67; F16K17/00; F16K27/00
Foreign References:
| KR100446455B1 | 2004-09-01 | |||
| KR101172318B1 | 2012-08-14 | |||
| JP5466509B2 | 2014-04-09 | |||
| KR101869910B1 | 2018-06-21 | |||
| US20150129047A1 | 2015-05-14 |
Attorney, Agent or Firm:
KIM, Hojong (KR)
Download PDF: