Title:
FLUID SERVO VALVE AND FLUID SERVO DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/201145
Kind Code:
A1
Abstract:
The present invention provides a fluid servo valve in which the supporting rigidity of a movable plate is not easily affected by assembly accuracy and component accuracy and little variation in basic valve characteristics occurs during mass production, the fluid servo valve comprising: a supply-side valve body 1 that includes a supply nozzle 11 communicating with a supply-side flow path 12 and configured to discharge a fluid from a tip portion; an exhaust-side valve body 2 that includes an exhaust nozzle 21 communicating with an exhaust-side flow path 22 and suctioning the fluid from the tip portion; a thin plate-shaped movable plate 3 that is provided between the tip portions of the supply nozzle 11 and the exhaust nozzle 21; an electromagnet 4 that deforms at least a part of the movable plate 3 to be displaced between the supply nozzle 11 and the exhaust nozzle 21; and a sandwiching structure P that is provided between the supply-side valve body 1 and the exhaust-side valve body 2 and presses and sandwiches an outer edge portion of the movable plate 3 in a thickness direction, wherein the sandwiching structure P includes a reference surface separated from the movable plate 3 by a predetermined distance in a state in which the exhaust-side valve body 2 is fixed to the supply-side valve body 1 and an annular pressing surface P2 protruding from the reference surface P1 toward the movable plate 3 and having a width dimension equal to or less than a predetermined value at which the movable plate 3 is pressed.
Inventors:
YAMAGUCHI SATOKI (JP)
OKADA TAKUMI (JP)
TAKIMOTO HIROSHI (JP)
MARUYAMA TERUO (JP)
OKADA TAKUMI (JP)
TAKIMOTO HIROSHI (JP)
MARUYAMA TERUO (JP)
Application Number:
PCT/JP2021/013958
Publication Date:
October 07, 2021
Filing Date:
March 31, 2021
Export Citation:
Assignee:
TOKKYOKIKI CORP (JP)
International Classes:
F16K31/06; F15B13/044
Foreign References:
| JP2016148373A | 2016-08-18 | |||
| JP2002071045A | 2002-03-08 | |||
| JP2004183863A | 2004-07-02 | |||
| JP2019132378A | 2019-08-08 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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