Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/113514
Kind Code:
A1
Abstract:
[Problem] To provide a fluid control device which is compact and with which data pertaining to the internal operation of the device can be acquired. [Solution] A fluid control device V which is disposed in a flow path of a fluid and with which data pertaining to internal operation can be obtained, said fluid control device V comprising: a sensor bonnet 44 to which is installed one or more sensors M2 for detecting operation inside the fluid control device; a valve body 1 which is connected to the sensor bonnet; a diaphragm 42 which is held inside the valve body and below the sensor bonnet; a cover part 5 which covers the outer periphery of the sensor bonnet; and a circuit board 60 which is electrically connected to the one or more sensors and which is provided inside the cover part such that the thickness direction of the circuit board is identical to the flow path direction.
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Inventors:
TSUJINO KENGO (JP)
TANNO RYUTARO (JP)
SHIBATA HIROTO (JP)
HARADA AKIHIRO (JP)
NAKATA TOMOHIRO (JP)
SHINOHARA TSUTOMU (JP)
TANNO RYUTARO (JP)
SHIBATA HIROTO (JP)
HARADA AKIHIRO (JP)
NAKATA TOMOHIRO (JP)
SHINOHARA TSUTOMU (JP)
Application Number:
PCT/JP2021/035950
Publication Date:
June 02, 2022
Filing Date:
September 29, 2021
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K27/02
Domestic Patent References:
| WO2018168872A1 | 2018-09-20 |
Foreign References:
| JP2020183799A | 2020-11-12 | |||
| JP2020085064A | 2020-06-04 |
Attorney, Agent or Firm:
KASUKAWA Toshio (JP)
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