Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/230160
Kind Code:
A1
Abstract:
This fluid control device (10) is provided with a valve (110), a pump (120), and a film valve (14). The valve (110) is provided with a first main plate (11), a second main plate (12) and the first side plate (13), and has a valve chamber (115). The first main plate (11) has a first vent hole (111), and the second main plate (12) has a second vent hole (121). The film valve (14) is arranged inside of the valve chamber (115). The first vent hole (111) is positioned in the center region of the valve chamber (115), and the second vent hole (121) is positioned in the outer edge region of the valve chamber (115). The film valve (14) is positioned between the first vent hole (111) and the second vent hole (121). The film valve (14) is fixed to the second main plate (12) in a state in which the end on the side of the outer edge region or the end on the side of the center region can vibrate.
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Inventors:
TANAKA NOBUHIRA (JP)
FUJISAKI MASAAKI (JP)
FUJISAKI MASAAKI (JP)
Application Number:
PCT/JP2019/012660
Publication Date:
December 05, 2019
Filing Date:
March 26, 2019
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
F04B45/04; F04B45/047; F16K7/17; F16K15/14
Domestic Patent References:
| WO2017038565A1 | 2017-03-09 | |||
| WO2008090725A1 | 2008-07-31 |
Foreign References:
| JP2016113953A | 2016-06-23 | |||
| JP2010223218A | 2010-10-07 | |||
| JPS5861372A | 1983-04-12 |
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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