Title:
FLUID CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/098333
Kind Code:
A1
Abstract:
This device (2) is formed by arranging multiple passage blocks (3). As a passage forming a main gas passage (9), each passage block (3) has a first inverted-V passage (15), and a first outlet passage (16) which allows communication between the apex of the first inverted-V passage (15) and an outlet (4b) of a first on-off valve (4). As a passage forming a vent gas passage (10), each passage block (3) has a second inverted-V passage (17), and a second outlet passage (18) which allows communication between the apex of the second inverted-V passage (17) and an outlet (5b) of a second on-off valve (5). As a passage forming a first sub-gas inflow passage (11), each passage block (3) has a common inlet passage (20), and a first inlet passage (19) communicating with an inlet (4a) of the first on-off valve (4). As a passage forming a second sub-gas inflow passage (12), each passage block (3) has a second inlet passage (21) communicating with an inlet (5a) of the second on-off valve (5), and a communication path (22) communicating with the common inlet passage (20).
Inventors:
KITANO TAICHI (JP)
SHINOHARA TSUTOMU (JP)
YAKUSHIJIN TADAYUKI (JP)
NAKATA TOMOHIRO (JP)
TANIKAWA TSUYOSHI (JP)
YAMAJI MICHIO (JP)
SHINOHARA TSUTOMU (JP)
YAKUSHIJIN TADAYUKI (JP)
NAKATA TOMOHIRO (JP)
TANIKAWA TSUYOSHI (JP)
YAMAJI MICHIO (JP)
Application Number:
PCT/JP2014/079956
Publication Date:
July 02, 2015
Filing Date:
November 12, 2014
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K27/00; F16K7/12
Domestic Patent References:
| WO2004036099A1 | 2004-04-29 | |||
| WO2013084744A1 | 2013-06-13 |
Foreign References:
| JP2013231460A | 2013-11-14 | |||
| JPH10300000A | 1998-11-13 | |||
| JP2001521120A | 2001-11-06 | |||
| US20130333768A1 | 2013-12-19 |
Attorney, Agent or Firm:
WATANABE, Akira et al. (JP)
Akira Watanabe (JP)
Akira Watanabe (JP)
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