Title:
FLOATING NON-CONTACT ULTRASONIC REINFORCED FLEXIBLE SUB-APERTURE POLISHING APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO/2023/005257
Kind Code:
A1
Abstract:
A floating non-contact ultrasonic reinforced flexible sub-aperture polishing apparatus and a polishing method therefor. The polishing apparatus comprises a flexible tool (101), a horn (102), an ultrasonic transducer (103), an electrically conductive ring rotor (104), an electrically conductive ring stator (105), a connecting shaft (106), a coupling (107), a ball spline nut (108), a ball spline shaft (109), and an axially constrained sleeve (110). The ball spline nut (108) is fixed in a ventilation main shaft (201) by means of a flange, the ball spline shaft (109) passes through the ball spline nut (108), one end of the coupling (107) is connected to the ball spline shaft (109), the other end of the coupling (107) is fixedly connected to one end of the connecting shaft (106), the other end of the connecting shaft (106) passes through the electrically conductive ring stator (105), the electrically conductive ring rotor (104) is fixedly connected to the connecting shaft (106), the electrically conductive ring stator (105) is fixed to an axial moving platform by means of a rotation stop, the transducer (103) is connected to the horn (102) by means of a flange, and the flexible tool (101) is fixed to an output end of the horn (102). The polishing apparatus and the polishing method therefor ensure that the normal of the tool at a processing point and the normal of a workpiece are kept at the same angle, thereby achieving sub-aperture processing, free floating of the tool in the axial direction, dynamic balance of gas pressure and dynamic pressure, and improved polishing efficiency.
Inventors:
ZHU WULE (CN)
HAN FANG (CN)
WU LU (CN)
SUN ANYU (CN)
JU BINGFENG (CN)
HAN FANG (CN)
WU LU (CN)
SUN ANYU (CN)
JU BINGFENG (CN)
Application Number:
PCT/CN2022/085965
Publication Date:
February 02, 2023
Filing Date:
April 08, 2022
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
B24B1/04; B24B37/11; B24B41/02
Foreign References:
| CN113601320A | 2021-11-05 | |||
| CN107175559A | 2017-09-19 | |||
| CN106002543A | 2016-10-12 | |||
| JP2005279902A | 2005-10-13 | |||
| CN108581816A | 2018-09-28 | |||
| JP2001038594A | 2001-02-13 | |||
| CN108637801A | 2018-10-12 |
Attorney, Agent or Firm:
HANGZHOU JUNDU PATENT FIRM (SPECIAL GENERAL PARTNERSHIP) (CN)
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