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Title:
FEEDSTOCK SUPPLY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/037880
Kind Code:
A1
Abstract:
A feedstock supply device according to one aspect of the present disclosure produces a reactive gas from a solution in which a solid feedstock has been dissolved in a solvent or from a dispersion system in which a solid feedstock has been dispersed into a dispersion medium. This feedstock supply device comprises: a container having a first wall surface forming an internal space; a spray nozzle for spraying the solution or the dispersion system into the internal space; and a wall structure provided to the internal space and having a second wall surface extending in the vertical direction.

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Inventors:
KOMORI EIICHI (JP)
Application Number:
PCT/JP2022/032015
Publication Date:
March 16, 2023
Filing Date:
August 25, 2022
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
C23C16/448; B01J7/00; B05B9/00; B05B15/00; H01L21/31
Foreign References:
JP2004115831A2004-04-15
JP2009147356A2009-07-02
JP2004107729A2004-04-08
JP2003273093A2003-09-26
JP2010003976A2010-01-07
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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