Title:
EXHAUST PIPE, EXHAUST APPARATUS, AND PRODUCT ATTACHEMENT PREVENTING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/265070
Kind Code:
A1
Abstract:
[Problem] In order to prevent an excessive temperature increase in dry pump piping without providing a cooling apparatus or the like, an exhaust pipe that prevents product attachment, an exhaust apparatus, and a product attachment preventing method are provided. [Solution] An excessive temperature increase occurs in a portion indicated by "X" in a dry pump 100. It is believed that a product attached to this portion is the cause of the excessive temperature increase. Thus, in order to minimize the attachment of the product in this portion, an inactive gas is introduced whereupon a swirl flow is caused. The effect of the swirl flow (see FIG. 4) causes components contained in the gas to gather at a central portion, thereby making the components less likely to attach to the wall surface of an exhaust pipe 18. Most of the components pass through the exhaust pipe 18 and are sent to an abatement apparatus 19.
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Inventors:
TAKAHASHI KATSUNORI (JP)
Application Number:
PCT/JP2022/024171
Publication Date:
December 22, 2022
Filing Date:
June 16, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
H01L21/31; F27D17/00; H01L21/205
Foreign References:
| US20080041448A1 | 2008-02-21 | |||
| JP2003260333A | 2003-09-16 | |||
| JPH0974091A | 1997-03-18 |
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