Title:
EXCIMER LAMP
Document Type and Number:
WIPO Patent Application WO/2022/044917
Kind Code:
A1
Abstract:
Provided is an improved excimer lamp in which a rare gas and a halogen are sealed in a discharge container. An excimer lamp (12) comprises: a discharge container (13) in which a rare gas and a halogen are sealed as light emitting gas; and a pair of a first electrode (14) and a second electrode (15) that generate a dielectric barrier discharge inside the discharge container (13). The rare gas is xenon or krypton. The discharge container (13) has, therein, a discharge forming region which is located between the first electrode (14) and the second electrode (15) and in which the discharge is formed, and a non-discharge region which communicates with the discharge forming region and in which the discharge is not formed. When the space volume inside the discharge container (13) is Vb [mm3], the inner surface area of the discharge container in the discharge formation region is Sd [mm2], and the halogen atom partial pressure enclosed in the discharge container 13 is Ph [Torr], the inequation (Vb × Ph) /Sd ≥ 4.50 is satisfied.
Inventors:
YAGYU HIDEAKI (JP)
Application Number:
PCT/JP2021/030197
Publication Date:
March 03, 2022
Filing Date:
August 18, 2021
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J65/00; H01J61/16; H01J61/30
Foreign References:
| JP2001185090A | 2001-07-06 | |||
| JP2014049280A | 2014-03-17 |
Attorney, Agent or Firm:
KONISHI Kay et al. (JP)
Download PDF:
Previous Patent: VEHICULAR RADAR SYSTEM AND VEHICLE
Next Patent: INACTIVATION DEVICE AND INACTIVATION METHOD
Next Patent: INACTIVATION DEVICE AND INACTIVATION METHOD