Title:
END EFFECTOR MEASUREMENT MODULE AND END EFFECTOR MONITORING DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2020/171350
Kind Code:
A1
Abstract:
An end effector measurement module and an end effector monitoring device using same are disclosed. According to the present invention, the end effector measurement module and the end effector monitoring device are disposed at a load port where a wafer is fed into semiconductor process equipment in an EFEM, so as to measure the moving path of an end effector and monitor a deviation of the end effector by using the measured moving path. Therefore, the present invention can automatically identify malfunctions occurring in a robot arm and can easily manage the maintenance and repair of the robot arm.
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Inventors:
LEE KYU OK (KR)
LIM JIN HEE (KR)
LIM JIN HEE (KR)
Application Number:
PCT/KR2019/015769
Publication Date:
August 27, 2020
Filing Date:
November 18, 2019
Export Citation:
Assignee:
LEE KYU OK (KR)
International Classes:
H01L21/67; H01L21/677
Foreign References:
| JP2009253286A | 2009-10-29 | |||
| KR20140042190A | 2014-04-07 | |||
| KR20160063090A | 2016-06-03 | |||
| JP2009135276A | 2009-06-18 | |||
| KR101620545B1 | 2016-05-13 | |||
| KR102020533B1 | 2019-09-10 |
Attorney, Agent or Firm:
PARK, Jungkyu (KR)
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