Title:
ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/095610
Kind Code:
A1
Abstract:
The present invention improves the noise resistance of a capacitor element that is formed within a through hole. This electronic device is provided with: a substrate; a through hole which penetrates through the substrate; a capacitor electrode which is formed along the lateral wall of the through hole and is used for a capacitor element; and an electromagnetic shielding layer which is formed along the lateral wall of the through hole so as to be positioned around the capacitor electrode. The capacitor electrode may be provided with: a first capacitor electrode which is used for the capacitor element; a second capacitor electrode which is used for the capacitor element; and a dielectric film which is disposed between the first capacitor electrode and the second capacitor electrode. The electromagnetic shielding layer may be connected to the ground potential. This electronic device may be provided with a wiring layer that is formed on the substrate.
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Inventors:
TOZAWA KATSUNORI (JP)
Application Number:
PCT/JP2023/032860
Publication Date:
May 10, 2024
Filing Date:
September 08, 2023
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01L27/04; H01L21/3205; H01L21/768; H01L21/822; H01L21/8234; H01L23/522; H01L27/00; H01L27/06; H01L27/088; H01L27/146
Foreign References:
| JP2004526321A | 2004-08-26 | |||
| JP2012169525A | 2012-09-06 | |||
| US20140312470A1 | 2014-10-23 | |||
| US20160104683A1 | 2016-04-14 | |||
| US20210036097A1 | 2021-02-04 |
Attorney, Agent or Firm:
MARUSHIMA, Toshikazu (JP)
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