Title:
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND ELECTRON BEAM DEVICE IN WHICH SAME IS USED
Document Type and Number:
WIPO Patent Application WO/2022/064557
Kind Code:
A1
Abstract:
The purpose of the present invention is to improve the current stability of a field emission electron source and a Schottky electron source in which the {100} plane of a hexaboride monocrystal is used as an electron emission surface. In the present invention, the distal end of a tip of a <100>-axis hexaboride monocrystal constituting an electron source is formed such that: a top facet of a {100} plane surrounded by side facets configured from at least four {n10} planes and at least four {n11} planes having n = 1, 2, 3 as integers is formed; and the total area of the side facets of the {n11} planes is greater than the total area of the side facets of the {n10} planes.
Inventors:
KUSUNOKI TOSHIAKI (JP)
ARAI NORIAKI (JP)
HASHIZUME TOMIHIRO (JP)
KASUYA KEIGO (JP)
ARAI NORIAKI (JP)
HASHIZUME TOMIHIRO (JP)
KASUYA KEIGO (JP)
Application Number:
PCT/JP2020/035749
Publication Date:
March 31, 2022
Filing Date:
September 23, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J9/02; H01J1/30
Domestic Patent References:
| WO2016140177A1 | 2016-09-09 |
Foreign References:
| JPS6031059B2 | 1985-07-19 | |||
| JP2018142453A | 2018-09-13 | |||
| JPS5693244A | 1981-07-28 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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