Title:
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND ELECTRON BEAM DEVICE IN WHICH SAME IS USED
Document Type and Number:
WIPO Patent Application WO/2020/044389
Kind Code:
A1
Abstract:
The present invention is an electron source provided with a columnar tip (4) of a hexaboride single crystal, a metal tube (12) for holding the columnar tip (4) of a hexaboride single crystal, and a filament (18) connected to the metal tube (12) at the center portion, wherein the electron source is characterized in that a portion of the columnar tip (4) of a hexaboride single crystal beyond the portion held by the metal tube (12) is formed as a cone shape, the distal end portion of the cone shape has a (310) crystal face, and Schottky electrons are released from the (310) crystal face. The present invention makes it possible to provide a novel electron source provided with a large current density and long-term stability of the released current and monochromaticity.
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Inventors:
KUSUNOKI TOSHIAKI (JP)
HASHIZUME TOMIHIRO (JP)
KASUYA KEIGO (JP)
ARAI NORIAKI (JP)
SEINO HIROMITSU (JP)
KANEDA MINORU (JP)
OHSHIMA TAKASHI (JP)
MATSUNAGA SOICHIRO (JP)
HASHIZUME TOMIHIRO (JP)
KASUYA KEIGO (JP)
ARAI NORIAKI (JP)
SEINO HIROMITSU (JP)
KANEDA MINORU (JP)
OHSHIMA TAKASHI (JP)
MATSUNAGA SOICHIRO (JP)
Application Number:
PCT/JP2018/031497
Publication Date:
March 05, 2020
Filing Date:
August 27, 2018
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J1/148; H01J1/15; H01J9/04; H01J37/06
Domestic Patent References:
| WO2018070010A1 | 2018-04-19 |
Foreign References:
| JP2017157368A | 2017-09-07 | |||
| JPH09283068A | 1997-10-31 |
Other References:
NAGATA, HARUTO ET AL.: "Thermal field emission observation of single-crystal LaB6", JOURNAL OF APPLIED PHYSICS, vol. 68, no. 7, 12 June 1990 (1990-06-12), pages 3614 - 3618, XP000171544, DOI: 10.1063/1.346322
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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