Title:
ELECTRON MICROSCOPE VIBRATION-DAMPING STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2023/197155
Kind Code:
A1
Abstract:
An electron microscope vibration-damping structure (010), comprising a housing (100), an electron emission portion (300) and an air extraction member (200), wherein a main chamber (101) is formed inside the housing (100), and an air extraction channel (1311) is provided. The electron emission portion (300) is arranged in the main chamber (101); a vibration isolation gap (011) is provided between a first end of the electron emission portion (300) and the housing (100); the electron emission portion (300) is provided with a communication port (301) at a first end; a first cavity (300a) is formed in the electron emission portion (300); and the communication port (301) is configured to be in communication with the air extraction channel (1311) and the first cavity (300a). The air extraction member (200) is arranged outside the housing (100) and is in communication with the air extraction channel (1311); and the air extraction member (200) is configured to pump air in the first cavity (300a) to the outside of the housing (100) by means of the communication port (301) and the air extraction channel (1311).
Inventors:
ZHAO ZHIDONG (CN)
SHAO YONGSHENG (CN)
JIANG PEIYING (CN)
LI QIANG (CN)
SHAO YONGSHENG (CN)
JIANG PEIYING (CN)
LI QIANG (CN)
Application Number:
PCT/CN2022/086366
Publication Date:
October 19, 2023
Filing Date:
April 12, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H01J37/26; F16F7/00
Foreign References:
| US5376799A | 1994-12-27 | |||
| CN112228494A | 2021-01-15 | |||
| CN205172884U | 2016-04-20 | |||
| CN2837830Y | 2006-11-15 | |||
| CN213574513U | 2021-06-29 | |||
| JP2010144739A | 2010-07-01 | |||
| JP2014235985A | 2014-12-15 |
Download PDF: