Title:
ELECTRON EMISSION APPARATUS AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/155493
Kind Code:
A1
Abstract:
Provided in the embodiments of the present disclosure are an electron emission apparatus and an electronic apparatus. The electron emission apparatus comprises a fire-resistant container and a heating power supply, the fire-resistant container being provided with a cavity part, the cavity part having a certain degree of vacuum, an electron emission material being arranged in the cavity part, at least one through hole being formed in the bottom of the fire-resistant container, and after being melted by heating, the electron emission material passing through the through hole so as to have an arc-shaped outwards-convex liquid surface and to emit electrons outwards. The embodiments of the present disclosure have a relatively good electron field emission effect and a high degree of product structure consistency, and achieve easy commissioning. The service life of the electron emission apparatus is in direct proportion to the mass of the accommodated electron emission material, so that the service life of the disclosed electronic apparatus can be remarkably prolonged compared with that of a traditional thermal field emission or cold field emission filament, thereby meeting the use requirements of an electron beam exposure machine, a scanning electron microscope, a transmission electron microscope and other X-ray sources.
Inventors:
LI XIJUN (CN)
Application Number:
PCT/CN2022/130787
Publication Date:
August 24, 2023
Filing Date:
November 09, 2022
Export Citation:
Assignee:
UNIV WESTLAKE (CN)
International Classes:
H01J1/05; H01J1/06; H01J1/10
Foreign References:
| CN114512378A | 2022-05-17 | |||
| CN113678224A | 2021-11-19 | |||
| JPS5971235A | 1984-04-21 | |||
| US5399865A | 1995-03-21 |
Attorney, Agent or Firm:
KINGSOUND & PARTNERS (CN)
Download PDF: