Title:
ELECTRON BEAM IRRADIATOR WITH ENHANCED COOLING EFFICIENCY OF THE TRANSMISSION WINDOW
Document Type and Number:
WIPO Patent Application WO/2015/125414
Kind Code:
A1
Abstract:
An electron beam irradiator 1 includes an electron source 2 capable of generating electrons e-, a vacuum chamber 3 with an interior 30 accommodating the electron source 2, a transmission window 5 that keeps the airtightness of the vacuum chamber 3 and allows transmission of the electrons e- from the electron source 2, and an air cooling member that cools the transmission window 5 with cooling gas 33. The transmission window 5 including a thin portion 50 that allows the passage of the electrons e- and a thick portion 51 that protrudes from the thin portion 50 to the outside of the vacuum chamber 3. The thick portion 51 having an air passage 57 that guides the cooling gas 33 from the air cooling member to the thin portion 50.
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Inventors:
BAKHTARI KAVEH
Application Number:
PCT/JP2015/000333
Publication Date:
August 27, 2015
Filing Date:
January 27, 2015
Export Citation:
Assignee:
HITACHI SHIPBUILDING ENG CO (JP)
International Classes:
H01J33/02; H01J33/04
Foreign References:
| US6140755A | 2000-10-31 | |||
| US20040251431A1 | 2004-12-16 | |||
| EP1068629A1 | 2001-01-17 | |||
| DE102008025868A1 | 2009-12-03 | |||
| US6407492B1 | 2002-06-18 |
Attorney, Agent or Firm:
MORIMOTO INT'L PATENT OFFICE (4-1 Nishi-Honmachi 1-chome, Nishi-ku, Osaka-sh, Osaka 05, JP)
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