Title:
ELECTROMAGNETIC ROTATING DEVICE AND VACUUM PUMP EQUIPPED WITH ELECTROMAGNETIC ROTATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/083946
Kind Code:
A1
Abstract:
[Problem] To provide an electromagnetic rotating device and a vacuum pump equipped with the electromagnetic rotating device whereby it is possible to reduce the size and costs by consuming power during regeneration through an electromagnet winding in a magnetic bearing device.
[Solution] A motor voltage monitoring circuit (60) detects a state where the voltage of a motor drive main circuit (30) becomes higher than the voltage during the normal operation due to overshoot or the like after reaching a set speed during deceleration or acceleration of a motor (121). At this time, the motor voltage monitoring circuit (60) sends a high voltage detection signal to a braking current adjustment circuit (70) and a magnetic bearing control circuit (50). Upon receiving the high voltage detection signal, the braking current adjustment circuit (70) reduces a braking current command value for the motor (121) so that the induction voltage of the motor (121) decreases or stays constant, whereas an amplifier control circuit (271) of the magnetic bearing control circuit (50), upon receiving the high voltage detection signal, increases a bias current flowing in the electromagnet winding (151) to increase power consumption.
Inventors:
OMORI HIDEKI (JP)
Application Number:
PCT/JP2013/077510
Publication Date:
June 05, 2014
Filing Date:
October 09, 2013
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F16C32/04; F04D19/04; H02P29/00
Foreign References:
| JP2003028072A | 2003-01-29 | |||
| JP2005022321A | 2005-01-27 | |||
| JPH04271288A | 1992-09-28 | |||
| JPH1047346A | 1998-02-17 | |||
| JP2005198441A | 2005-07-21 | |||
| JPH07279962A | 1995-10-27 | |||
| JP2002180990A | 2002-06-26 | |||
| JP2004112877A | 2004-04-08 |
Other References:
See also references of EP 2928073A4
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