Title:
ELECTRICAL VARIABLE CAPACITOR CIRCUIT AND SEMICONDUCTOR PROCESSING SYSTEM COMRPISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/128119
Kind Code:
A1
Abstract:
According to the present invention, disclosed is an electrical variable capacitor circuit and a semiconductor processing system comprising same. The semiconductor processing system of the present invention comprises: an RF power supply, which generates and supplies RF power; a plasma chamber, which receives the RF power from the RF power supply; and an impedance matching circuit, which is arranged between the RF power supply and the plasma chamber so as to match output impedance to the plasma chamber, wherein the impedance matching circuit includes a plurality of electrical variable capacitor circuits, and at least one of the plurality of electrical variable capacitor circuits includes: a first node connected to one side of the RF power supply; a second node connected to the other side of the RF power supply; a variable capacitor connected to the first node; an inductor connected in parallel to the variable capacitor; a switch connected in series to the inductor; and a PIN diode connected in parallel to the inductor and the switch.
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Inventors:
SUH YONGSUG (KR)
MIN JUHWA (KR)
MIN JUHWA (KR)
Application Number:
PCT/KR2022/012271
Publication Date:
July 06, 2023
Filing Date:
August 17, 2022
Export Citation:
Assignee:
INDUSTRIAL COOPERATION FOUNDATION JEONBUK NATIONAL UNIV (KR)
International Classes:
H01J37/32; H03H7/38
Domestic Patent References:
| WO2020112921A1 | 2020-06-04 |
Foreign References:
| KR102077402B1 | 2020-02-13 | |||
| KR20190011776A | 2019-02-07 | |||
| KR20200111233A | 2020-09-28 | |||
| US20190172683A1 | 2019-06-06 |
Attorney, Agent or Firm:
ISIS IP LAW LLC (KR)
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