Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/190697
Kind Code:
A1
Abstract:
This elastic wave device 10 comprises: a support member 20 that has a cavity 23 on one of the two main surfaces thereof; a piezoelectric layer 21 that is provided on the one main surface of the support member 20 so as to cover the cavity 23; and function electrodes 22 that are provided on at least one of the two main surfaces of the piezoelectric layer 21 such that at least some of the function electrodes 22 overlie the cavity 23 as viewed in the thickness direction of the piezoelectric layer 21. In the piezoelectric layer 21, cracks 24 are provided in a region which overlies the cavity 23 when viewed in the thickness direction of the piezoelectric layer 21 and in which the function electrodes 22 are not provided. The cracks 24 have a width smaller than the thickness of the piezoelectric layer 21 and continuously extend from the one main surface of the piezoelectric layer 21 to the other main surface thereof.
Inventors:
INOUE KAZUNORI (JP)
SUZUKI KATSUMI (JP)
SUZUKI KATSUMI (JP)
Application Number:
PCT/JP2023/012836
Publication Date:
October 05, 2023
Filing Date:
March 29, 2023
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25; H03H9/17
Domestic Patent References:
| WO2017221649A1 | 2017-12-28 |
Foreign References:
| JP2017108288A | 2017-06-15 | |||
| JP2010136317A | 2010-06-17 | |||
| JP2016123016A | 2016-07-07 | |||
| US20210328575A1 | 2021-10-21 | |||
| JP2011029526A | 2011-02-10 |
Attorney, Agent or Firm:
WISEPLUS IP FIRM (JP)
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