Title:
ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/224862
Kind Code:
A1
Abstract:
Provided is an elastic wave device that is not prone to deterioration of device characteristics. The elastic wave device 1 has: a piezoelectric film 5 provided directly or indirectly on a high-acoustic velocity material layer 3; and an IDT electrode 7 provided on the piezoelectric film 5. A dielectric film 6 is laminated between the IDT electrode 7 and the piezoelectric film 5. The IDT electrode 7 has, in an intersecting region where a first electrode finger 13 and a second electrode finger 14 overlap, a center region C, and first and second low-acoustic velocity regions E1, E2 provided on both sides in the extension direction of the first and second electrode fingers 13 and 14. Also, the dielectric film 6 is, depending on the type of material thereof, imparted in the film thickness range shown in table 1 below.
Inventors:
OKADA TAKURO (JP)
Application Number:
PCT/JP2022/017509
Publication Date:
October 27, 2022
Filing Date:
April 11, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/145; H03H9/25
Domestic Patent References:
| WO2021039038A1 | 2021-03-04 | |||
| WO2019139076A1 | 2019-07-18 | |||
| WO2021220887A1 | 2021-11-04 |
Foreign References:
| US20170155373A1 | 2017-06-01 |
Attorney, Agent or Firm:
OSAKA FRONT (JP)
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