Title:
ELASTIC WAVE DEVICE AND METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/211103
Kind Code:
A1
Abstract:
This elastic wave device comprises: a support member having a support substrate and an intermediate layer formed on the support substrate; a piezoelectric layer having through-holes and disposed on the intermediate layer; a function electrode disposed on the piezoelectric layer; and a cavity portion provided to both the support substrate and the intermediate layer. At least a part of the function electrode overlaps the cavity portion in a plan view in the stacking direction of the support member and the piezoelectric layer. The cavity portion has a first cavity region which is formed in the intermediate layer and which is in communication with the through-holes of the piezoelectric layer and a second cavity region which is in the support substrate and is between the first cavity region and the bottom surface of a recess opened toward the first cavity region. The intermediate layer has a portion projected inward from the peripheral edge of the recess of the support substrate in a cross-sectional view in the thickness direction of the support member.
Inventors:
INOUE KAZUNORI (JP)
SUZUKI KATSUMI (JP)
SUZUKI KATSUMI (JP)
Application Number:
PCT/JP2022/016891
Publication Date:
October 06, 2022
Filing Date:
March 31, 2022
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2016147687A1 | 2016-09-22 | |||
| WO2012073871A1 | 2012-06-07 |
Foreign References:
| JP2010147875A | 2010-07-01 | |||
| JP2005311511A | 2005-11-04 | |||
| US20200321939A1 | 2020-10-08 |
Attorney, Agent or Firm:
YAMAO, Norihito et al. (JP)
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