Title:
DUST MEASURING DEVICE, DUST MEASURING METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2023/022117
Kind Code:
A1
Abstract:
This dust measuring device includes: a substrate having a first primary surface on the perpendicular-direction upper side and a second primary surface on the perpendicular-direction lower side; an image capture unit that captures images of a region on the first primary surface at prescribed times; and an image analyzing unit that, on the basis of the images captured by the image capture unit, measures the number of pieces of dust on the first primary surface at prescribed times.
Inventors:
OGAKI SATOSHI (JP)
Application Number:
PCT/JP2022/030831
Publication Date:
February 23, 2023
Filing Date:
August 12, 2022
Export Citation:
Assignee:
AGC INC (JP)
International Classes:
G01N15/06
Foreign References:
| JP2003075353A | 2003-03-12 | |||
| JPH0637750U | 1994-05-20 | |||
| JP2020502490A | 2020-01-23 | |||
| JP2014048100A | 2014-03-17 | |||
| JP2016080515A | 2016-05-16 |
Attorney, Agent or Firm:
EIKOH PATENT FIRM, P.C. (JP)
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