Title:
DROPLET DISCHARGE DEVICE, DROPLET DISCHARGE METHOD, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2023/199749
Kind Code:
A1
Abstract:
This droplet discharge device comprises a floating stage, a conveyance unit, a discharge head, and a control unit. The floating stage extends along the conveyance direction of a substrate, and causes the substrate to float due to the pressure of an ejected gas. The conveyance unit holds the substrate floated by the floating stage and moves the substrate along the floating stage. The discharge head is positioned above the floating stage and discharges droplets of a functional liquid. The control unit controls the conveyance unit and the discharge head. The floating stage has a carry-in/out stage where the substrate is carried in and out. The control unit executes a carry-in process for transferring the substrate to the conveyance unit on the carry-in/out stage, followed by a drawing process for moving the conveyance unit holding the substrate to eject droplets of the functional liquid from the discharge head onto the substrate while passing the substrate under the discharge head, and thereafter a carry-out process for returning the conveyance unit to the carry-in/out stage and releasing holding of the substrate by the conveyance unit.
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Inventors:
MINE YOUSUKE (JP)
ISHIDA HIROSHI (JP)
ISHIDA HIROSHI (JP)
Application Number:
PCT/JP2023/013044
Publication Date:
October 19, 2023
Filing Date:
March 30, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B05C13/02; B05C5/00; B05D1/26; B05D3/00
Foreign References:
| JP2021027174A | 2021-02-22 | |||
| JP2022011083A | 2022-01-17 | |||
| JP2016077966A | 2016-05-16 | |||
| JP2006272207A | 2006-10-12 | |||
| JP2017087103A | 2017-05-25 | |||
| JP2022513842A | 2022-02-09 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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