Title:
DRIVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/033399
Kind Code:
A1
Abstract:
A drive device (10), comprising ceramic pumps (18a) and (18b), wherein working fluid (100) in a flow passage (13a) is alternately pressurized and depressurized by the ceramic pumps on the left and right sides of a movable body (110) to move the movable body (110) in the flow passage (13a), the flow passage (13a) is allowed to communicate with an inner pressure damping chamber (15a) having compressible gas stored therein through fine flow passages (16a1) and (16b1), since the fine flow passages provides a large flow passage resistance when the pressure of the working fluid (100) is rapidly increased or decreased by the ceramic pumps, the pressure inside the flow passage is not released to the inner pressure damping chamber (15a) and, therefore, the mobile body (110) surely moves in the flow passage, whereas, since the fine flow passages provide a small flow passage resistance against the gentle rise of pressure of the working fluid (100) due to expansion, the working fluid (100) is led into the inner pressure damping chamber (15a) to suppress the rise of pressure of the working fluid (100), whereby, even when the working fluid is thermally expanded, a pump chamber or a seal is not damaged.
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Inventors:
TAKEUCHI YUKIHISA
TAKAHASHI NOBUO
BESSHO YUKI
TAKAHASHI NOBUO
BESSHO YUKI
Application Number:
PCT/JP2002/010575
Publication Date:
April 24, 2003
Filing Date:
October 11, 2002
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
F15B7/00; F15C5/00; F16K99/00; (IPC1-7): B81B5/00; F04B9/00; F15B15/14
Foreign References:
| JP2000320504A | 2000-11-24 | |||
| JP2606641Y2 | 2000-12-18 | |||
| JPH05346105A | 1993-12-27 | |||
| JP2609998B2 | 1997-05-14 | |||
| JP2000087862A | 2000-03-28 |
Attorney, Agent or Firm:
Oba, Sakio (Nagoya-KS Building 1-18 Taiko 3-chome
Nakamura-ku Nagoya-shi, Aichi, JP)
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