Title:
DISPLACEMENT MEASUREMENT METHOD, AND DISPLACEMENT MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/122536
Kind Code:
A1
Abstract:
In the present disclosures, in order to perform displacement measurement wherein optical resolution adjustment is possible, the effect is small with respect to mispositioning of the surface orientation of a diffraction grating, the configuration is simple, increased compactness is possible, and the inclination precision of an optical element has no effect, laser light (13) from a laser light source (12) is made into parallel light (15) by means of a collimator lens (14), is passed through a first diffraction grating (16), is allowed to proceed to a semi-transparent semi-reflective mirror (22), and a portion is reflected as first reversed light (L rev1) that passes through the first diffraction grating (16). The remainder of the parallel light (15) is allowed to proceed to a total reflection mirror (24) and is reflected as second reversed light (L rev2) that passes through the semi-transparent semi-reflective mirror (22) and the first diffraction grating (16). The amount of refracted light of a predetermined order that is of the first and second reversed light (L rev1, L rev2) and that results from the first diffraction grating is detected by a first optical sensor (28), and the amount of displacement is obtained from the interference band or a signal thereof corresponding to the amount of relative motion in the axial direction of the total reflection mirror (24) with respect to the semi-transparent semi-reflective mirror (22).
Inventors:
OYAMA KATSUHIRO (JP)
IKEDA MASATO (JP)
IKEDA MASATO (JP)
Application Number:
PCT/JP2011/057560
Publication Date:
October 06, 2011
Filing Date:
March 28, 2011
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
OYAMA KATSUHIRO (JP)
IKEDA MASATO (JP)
OYAMA KATSUHIRO (JP)
IKEDA MASATO (JP)
International Classes:
B62M6/80; G01B11/00; F16D66/00; G01B11/16
Foreign References:
| JPH1183433A | 1999-03-26 | |||
| JP2005147828A | 2005-06-09 | |||
| JPH051926A | 1993-01-08 | |||
| JP2001033209A | 2001-02-09 | |||
| JPH03279812A | 1991-12-11 |
Download PDF:
Claims:
Previous Patent: VERTICAL SHAFT FURNACE, FERRO-COKE PRODUCTION FACILITY, AND METHOD FOR PRODUCING FERRO-COKE
Next Patent: UNBLEACHED PACKAGING PAPER
Next Patent: UNBLEACHED PACKAGING PAPER