Title:
DILUTE CHEMICAL SOLUTION PRODUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/195341
Kind Code:
A1
Abstract:
A dilute chemical solution production device 1 that has a plunger pump and a chemical solution supply pipe 3 that supply a chemical solution S from a chemical solution storage tank. The terminus of the chemical solution supply pipe 3 is an injection point 11 for the chemical solution S. The chemical solution supply pipe 3 is inserted into first piping that is an ultrapure water passage 12 to approximately the center thereof in the radial direction via a bore-through joint 13. A conductivity meter 14 is provided as a conductivity measurement means downstream of the bore-through joint 13, which is the injection point 11, and is connected to a control means (not shown), and the plunger pump 4 can be controlled in accordance with measured values from the conductivity meter 14. This dilute chemical solution production device makes it possible to stably produce a dilute chemical solution that has an extremely low concentration of acid/base or the like by means of a simple structure.
Inventors:
SUGITA WATARU (JP)
OGAWA YUICHI (JP)
OGAWA YUICHI (JP)
Application Number:
PCT/JP2020/006171
Publication Date:
October 01, 2020
Filing Date:
February 18, 2020
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
International Classes:
B01F1/00; B01F3/08; B01F5/00; B01F15/04; H01L21/304
Domestic Patent References:
| WO2016042933A1 | 2016-03-24 | |||
| WO2018225278A1 | 2018-12-13 | |||
| WO2018116987A1 | 2018-06-28 |
Foreign References:
| JPS59218731A | 1984-12-10 | |||
| JP2019107601A | 2019-07-04 |
Attorney, Agent or Firm:
HAYAKAWA Yuzi et al. (JP)
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