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Title:
DIAPHRAGM VALVE AND FLOWRATE CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/032393
Kind Code:
A1
Abstract:
Provided is a diaphragm valve which is miniaturized while ensuring a necessary flowrate and which has improved assemblability and maintainability. This diaphragm valve comprises: a body (10) that defines a flow channel; a diaphragm (40) provided in the bottom surface (15c) of a storage recess (15); a fixing ring (42) screwed with a thread portion (15a) formed in the inner circumferential surface of the storage recess (15) to fix the diaphragm (40) to the body (10); a laminated piezoelectric actuator (22); a support plate (24) that supports the laminated piezoelectric actuator (22); a cylindrical actuator cover (26) which holds a diaphragm presser (27) and which stores thereinside the laminated piezoelectric actuator (22) and has transmitted thereto displacement caused by a piezoelectric effect of the laminated piezoelectric actuator (22); and a fixing member (28) that is screwed with a thread portion (15a) shared with the thread portion (15a) and fixes the position of the support plate (24) in the storage recess (15) cooperatively with the fixing ring (42).

Inventors:
SHIGYOU KOHEI (JP)
HIROSE TAKASHI (JP)
MATSUDA TAKAHIRO (JP)
WATANABE KAZUNARI (JP)
Application Number:
PCT/JP2022/023054
Publication Date:
March 09, 2023
Filing Date:
June 08, 2022
Export Citation:
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Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/14; F16K31/02
Domestic Patent References:
WO2019167711A12019-09-06
Foreign References:
JPH08338546A1996-12-24
JP2014190387A2014-10-06
CN103967912A2014-08-06
Attorney, Agent or Firm:
KEN IP LAW FIRM (JP)
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