Title:
DIAPHRAGM VALVE, FLOW RATE CONTROL DEVICE, FLUID CONTROL DEVICE, AND SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/131631
Kind Code:
A1
Abstract:
[Problem] To provide a diaphragm valve in which axis shifting of a stem is reduced. [Solution] A diaphragm valve having a valve body with a flow path inside and a valve chamber recessed in the upper surface, a diaphragm that is positioned in the valve chamber and that can open and close the flow path and adjust the opening degree by elastic deformation, a stem that elastically deforms by pressing the diaphragm, an actuator that drives the stem, and a support mechanism that is fixed to the valve body and that supports the stem and the actuator, the diaphragm valve characterized in that the stem 8 comprises a first stem member 8a connected to the actuator via a displacement transmission member 5, and a second stem member 8b which is held by the support mechanism 10 via a sleeve 15 so as to be capable of axial displacement, the upper end of which comes into contact with the lower end of the first stem member 8a, and which is driven by the first stem member 8a to press on the diaphragm 17.
Inventors:
SHIGYOU KOHEI (JP)
HIROSE TAKASHI (JP)
HIROSE TAKASHI (JP)
Application Number:
PCT/JP2020/045391
Publication Date:
July 01, 2021
Filing Date:
December 07, 2020
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/12; C23C16/455; F16K31/02
Foreign References:
| JP2017044321A | 2017-03-02 | |||
| JPH11173440A | 1999-06-29 | |||
| JP2003120461A | 2003-04-23 | |||
| JP2017057911A | 2017-03-23 |
Attorney, Agent or Firm:
KEN IP LAW FIRM (JP)
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