Title:
DEPOSITION DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/080411
Kind Code:
A1
Abstract:
A deposition device according to the present embodiment may comprise: a chamber in which a space is formed; an evaporation source, which is accommodated in the chamber and has a nozzle; a laser for outputting a laser beam through the nozzle above the evaporation source; a main glass which is disposed in the chamber, and through which the laser beam is transmitted; a cover plate which is accommodated in the space, and on which a plurality of cover glasses are loaded; and a rotating device for rotating the cover plate such that the plurality of cover glasses selectively face the main glass.
Inventors:
MOON BYOUNGJUN (KR)
LEE JAEYOUNG (KR)
KIM SUNKEE (KR)
JEON CHANGYEOP (KR)
LEE JAEYOUNG (KR)
KIM SUNKEE (KR)
JEON CHANGYEOP (KR)
Application Number:
PCT/KR2022/015543
Publication Date:
April 18, 2024
Filing Date:
October 14, 2022
Export Citation:
Assignee:
LG ELECTRONICS INC (KR)
International Classes:
C23C14/56; B05B15/52; C23C14/24
Foreign References:
| KR102237185B1 | 2021-04-07 | |||
| KR20210113462A | 2021-09-16 | |||
| KR100847677B1 | 2008-07-23 | |||
| KR20170084418A | 2017-07-20 | |||
| KR102052569B1 | 2019-12-06 |
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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