Title:
CRYSTALLIZED INDIUM TIN COMPOSITE OXIDE FILM, TRANSPARENT ELECTRIC CONDUCTIVE FILM, AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/262047
Kind Code:
A1
Abstract:
This crystallized indium tin composite oxide film 1 has a thickness of 35 nm or more. This crystallized indium tin composite oxide film 1 contains crystal particles with a mean particle diameter of 110 nm or more.
Inventors:
TAKESHITA SHOYA (JP)
ANDO HIDEHIKO (JP)
ANDO HIDEHIKO (JP)
Application Number:
PCT/JP2020/023276
Publication Date:
December 30, 2020
Filing Date:
June 12, 2020
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
B32B9/00; B32B7/025; C23C14/08; C23C14/58; H01B5/14; H01B13/00
Domestic Patent References:
| WO2011048996A1 | 2011-04-28 |
Foreign References:
| JP2011214043A | 2011-10-27 |
Attorney, Agent or Firm:
OKAMOTO, Hiroyuki et al. (JP)
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