Title:
CONVEYANCE DEVICE, CONVEYANCE METHOD, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2022/195693
Kind Code:
A1
Abstract:
This conveyance device comprises: a suction head which suctions and conveys an electronic component; a movement control unit which moves the suction head; a rotation control unit which controls a rotation position of the suction head centered on a predetermined axis of rotation; and a suction control unit which causes the suction head to suction the electronic component such that a load exerted on the electronic component from the suction head in conjunction with the movement of the suction head is less than or equal to a predetermined pressure. The movement control unit sets a correction amount of the predetermined pressure based on the self-weight of the suction head on the basis of the rotation position of the suction head. Using a conveyance device such as the foregoing makes it possible to improve the accuracy of load control during suction or suction release of an electronic component.
Inventors:
NOMURA KATSUTOSHI (JP)
Application Number:
PCT/JP2021/010475
Publication Date:
September 22, 2022
Filing Date:
March 16, 2021
Export Citation:
Assignee:
SHINKAWA KK (JP)
International Classes:
H01L21/677
Domestic Patent References:
| WO2018061103A1 | 2018-04-05 | |||
| WO2012073282A1 | 2012-06-07 | |||
| WO2017119216A1 | 2017-07-13 |
Foreign References:
| JP2017108056A | 2017-06-15 | |||
| JP2001077155A | 2001-03-23 | |||
| JP2012202416A | 2012-10-22 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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