Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CONTROL VALVE DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/055688
Kind Code:
A1
Abstract:
Provided is a control valve device wherein the accuracy in opening and closing of a valve is improved. A control valve device (300) has a valve body (310) having a valve body head (310a), a power transmission member (320a) for transmitting power to the valve body, a valve housing (305) in which the valve body is slidably stored, a first bellows (320b) which defines a first space (Us) at a position on the opposite side of the power transmission member to the valve body, a second bellows (320c) which defines a second space (Ls) at a position on the side of the power transmission member to the valve body, a first pipe (320d) which communicates with the first space, and a second pipe (320e) which communicates with the second space. Power is transmitted from the power transmission member to the valve body in accordance with the pressure ratio of working fluid supplied to the first space and the second space, so the valve body head opens and closes a transfer path formed in the valve housing. The valve body head has a Vickers hardness higher than that of the valve seat surface of the transfer path, with which the valve body head is brought into contact, and the hardness difference therebetween is generally 200-300 Hv.

Inventors:
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
TANIKAWA TSUYOSHI (JP)
KANEKO HIROSHI (JP)
YAGI YASUSHI (JP)
ONO YUJI (JP)
OHMI TADAHIRO (JP)
SHIRAI YASUYUKI (JP)
Application Number:
PCT/JP2010/069262
Publication Date:
May 12, 2011
Filing Date:
October 29, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJIKIN KK (JP)
TOKYO ELECTRON LTD (JP)
UNIV TOHOKU (JP)
IKEDA NOBUKAZU (JP)
YAMAJI MICHIO (JP)
TANIKAWA TSUYOSHI (JP)
KANEKO HIROSHI (JP)
YAGI YASUSHI (JP)
ONO YUJI (JP)
OHMI TADAHIRO (JP)
SHIRAI YASUYUKI (JP)
International Classes:
F16K31/126; F16K1/34; F16K51/02
Domestic Patent References:
WO2009093608A12009-07-30
WO2008120788A12008-10-09
Foreign References:
JP2009162319A2009-07-23
JPS6113067A1986-01-21
JPS6131772A1986-02-14
JP2004162640A2004-06-10
Attorney, Agent or Firm:
KAMEYA, Yoshiaki et al. (JP)
Yoshiaki Kameya (JP)
Download PDF: