COMPOSITE CATALYST FOR CHEMICAL MECHANICAL PLANARIZATION AND PREPARATION METHOD THEREFOR, AND POLISHING SOLUTION

Title:

COMPOSITE CATALYST FOR CHEMICAL MECHANICAL PLANARIZATION AND PREPARATION METHOD THEREFOR, AND POLISHING SOLUTION

Document Type and Number:

WIPO Patent Application WO/2022/089624

Kind Code:

A1

Abstract:

Embodiments of the present application provide a composite catalyst for chemical mechanical planarization, the composite catalyst comprising a carrier, catalyst nanoparticles supported on the carrier, and a porous protective layer wrapping the carrier and the catalyst nanoparticles, wherein the carrier includes an inorganic carrier or a polymer carrier, and the porous protective layer includes a porous material. The composite catalyst has a high catalytic efficiency, and neither inherently limits the pH range of a polishing solution nor has metal ion pollution, thereby facilitating post-cleaning and reduction of the device defect rate; and the presence of the porous protective layer can avoid direct friction between the catalyst nanoparticles and the surface of a device, thereby avoiding device scratching and catalyst failure. Using the polishing solution of the composite catalyst of the embodiments of the present application for a chemical mechanical planarization process can facilitate a post-cleaning process while improving the polishing rate and reducing the generation of device defects. Further provided are a method for preparing the composite catalyst and a polishing solution using the composite catalyst.

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Inventors:

YANG QING (CN)
ZOU HAILIANG (CN)
ZHOU HUIHUI (CN)

Application Number:

PCT/CN2021/127773

Publication Date:

May 05, 2022

Filing Date:

October 30, 2021

Export Citation:

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Assignee:

HUAWEI TECH CO LTD (CN)

International Classes:

C09G1/02; B01J35/10; C09K3/14; H01L21/304; H01L21/321

Foreign References:

CN104513628A	2015-04-15
CN104046246A	2014-09-17
US5958288A	1999-09-28
CN105457646A	2016-04-06

Other References:

HE DAPING, RONG YUANYANG, CARTA MARIOLINO, MALPASS-EVANS RICHARD, MCKEOWN NEIL B., MARKEN FRANK: "Fuel cell anode catalyst performance can be stabilized with a molecularly rigid film of polymers of intrinsic microporosity (PIM)", RSC ADVANCES, vol. 6, no. 11, 1 January 2016 (2016-01-01), pages 9315 - 9319, XP055925684, DOI: 10.1039/C5RA25320A

Attorney, Agent or Firm:

SCIHEAD IP LAW FIRM (CN)

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