Title:
COATING FILM, MANUFACTURING METHOD THEREFOR, AND PVD APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/104822
Kind Code:
A1
Abstract:
The purpose of the invention is to provide technology, which, in addition to being capable of forming thick hard carbon films of excellent durability even using PVD, is able to establish both chipping resistance and abrasion resistance in the formed hard carbon film and able to improve low friction properties and peeling resistance. Provided is a coating film to be coated on the surface of a substrate, the coating film having a total film thickness of greater than 1 µm to 50 µm wherein: when a cut surface is observed using bright field TEM images, white hard carbon layers that are shown as relatively white and black hard carbon layers that are shown as black are alternately laminated in the thickness direction; and the white hard carbon layers have regions that have grown in a fan-shape in the thickness direction. Provided is a coating film manufacturing method for forming the coating film on the surface of a substrate using PVD, wherein conditions for film formation on the substrate are controlled so that the substrate repeatedly alternates temperature increase and temperature decrease between a low temperature range of greater than 50°C to 200°C and a high temperature range of greater than 200°C to 300°C, and the substrate is rotated and/or made to revolve.
Inventors:
MORIGUCHI HIDEKI (JP)
SHIBATA AKINORI (JP)
OOSHIRO TAKEHIKO (JP)
ITO YOSHIHIRO (JP)
OKAZAKI TAKAHIRO (JP)
SUGIURA HIROYUKI (JP)
SHIBATA AKINORI (JP)
OOSHIRO TAKEHIKO (JP)
ITO YOSHIHIRO (JP)
OKAZAKI TAKAHIRO (JP)
SUGIURA HIROYUKI (JP)
Application Number:
PCT/JP2016/087612
Publication Date:
June 22, 2017
Filing Date:
December 16, 2016
Export Citation:
Assignee:
NIPPON ITF INC (JP)
NIPPON PISTON RING CO LTD (JP)
NIPPON PISTON RING CO LTD (JP)
International Classes:
C23C14/06; C01B32/15; C01B32/18; C01B32/182; C23C14/32; F16J9/26
Domestic Patent References:
| WO2012063735A1 | 2012-05-18 |
Foreign References:
| JP2012527583A | 2012-11-08 | |||
| JP2009504448A | 2009-02-05 | |||
| JP2015063714A | 2015-04-09 | |||
| JP2008001951A | 2008-01-10 | |||
| JP2002322555A | 2002-11-08 | |||
| JPH10226874A | 1998-08-25 |
Other References:
See also references of EP 3392369A4
Attorney, Agent or Firm:
JODAI, Tetsuji et al. (JP)
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