Title:
COATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/218833
Kind Code:
A1
Abstract:
Provided is a coating device capable of shortening takt time for coating operations. Specifically, a coating device provided with a stage on which a substrate is carried and a coating unit for forming a coating film on the substrate carried on the surface of the stage by moving relative to the substrate in one direction while discharging a coating liquid, the device having a configuration wherein: the coating unit has an applicator for discharging the coating liquid and a support unit for supporting the applicator; the support unit has a column, which is disposed on one side of the width direction orthogonal to the coating direction, and a beam, which extends from the column so as to cross the stage; and the applicator is supported by the support unit with a cantilever beam structure by being attached to the beam.
Inventors:
HAMAKAWA KENJI (JP)
SUZUKI AKIO (JP)
SUZUKI AKIO (JP)
Application Number:
PCT/JP2023/014660
Publication Date:
November 16, 2023
Filing Date:
April 11, 2023
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
B05C11/00; B05C5/00; B05C11/10
Foreign References:
| JP2009195907A | 2009-09-03 | |||
| JP2008136978A | 2008-06-19 | |||
| JP2006015210A | 2006-01-19 | |||
| CN102784740A | 2012-11-21 |
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