Title:
COATING DEVICE AND METHOD FOR MANUFACTURING COATED ARTICLE
Document Type and Number:
WIPO Patent Application WO/2018/147122
Kind Code:
A1
Abstract:
Provided is a coating device that can control film thickness distribution in the circumferential direction of a workpiece. The coating device is provided with: a workpiece rotating device (5) for rotating and revolving a plurality of workpieces (100) held thereby; targets (3) having ejection surfaces (3a) from which particles serving as material for coating the outer peripheral surfaces of the workpieces (100) are ejected; power supplies (4) for imparting to the targets (3) an arc current by which the particles are ejected from the targets (3); and a control unit (23) for controlling each power supply (4) such that the output for the arc current is higher than a reference output in a specific period which is at least part of a period wherein a specific part (102) of a rotating workpiece (100) is oriented to an ejection surface (3a).
Inventors:
FUJII HIROFUMI
Application Number:
PCT/JP2018/002837
Publication Date:
August 16, 2018
Filing Date:
January 30, 2018
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C14/54; C23C14/06; C23C14/24; C23C14/34; C23C14/50; F16J9/26
Foreign References:
| JP4680380B2 | 2011-05-11 | |||
| JPH0682465U | 1994-11-25 | |||
| JP2016520779A | 2016-07-14 | |||
| JP2006063391A | 2006-03-09 | |||
| JPH11200017A | 1999-07-27 | |||
| JP4680380B2 | 2011-05-11 |
Other References:
See also references of EP 3564405A4
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
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