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Title:
CHEMICAL LIQUID VALVE
Document Type and Number:
WIPO Patent Application WO/2005/033564
Kind Code:
A1
Abstract:
A chemical liquid valve (1A) with stable sealing performance allowing a diaphragm (7) connected to a piston rod (10A) to come into contact with or apart from a valve seat (5) installed between an input port (3) and an output port (4). A lock part (7d) formed in a semi-spherical shape at the tip part is formed at the diaphragm (7), and the lock part (7d) is inserted into the recessed part (10a) of the piston rod (10A) to engage with the recessed part (10a) so that the lock part (7d) of the diaphragm (7) can be brought into point-contact with the inner wall of the recessed part (10a) of the piston rod (10A) to swingably hold the diaphragm (7) on the piston rod (10A).

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Inventors:
MASAMURA AKINORI (JP)
OSUGI SHIGERU (JP)
Application Number:
PCT/JP2004/013739
Publication Date:
April 14, 2005
Filing Date:
September 21, 2004
Export Citation:
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Assignee:
CKD CORP (JP)
MASAMURA AKINORI (JP)
OSUGI SHIGERU (JP)
International Classes:
F16K1/00; F16K7/17; F16K1/32; F16K7/14; F16K31/122; F16K41/12; (IPC1-7): F16K7/17
Foreign References:
JP2002089725A2002-03-27
JPH09273641A1997-10-21
JPH09229213A1997-09-05
JPH0627552B21994-04-13
JPH0875017A1996-03-19
JP2001263508A2001-09-26
JP2603964Y22000-04-04
JP3421346B22003-06-30
JP2580645Y21998-09-10
JPS61218873A1986-09-29
Attorney, Agent or Firm:
Cosmos, Patent Office (Nagoya Center Building 2-22, Nishiki 2-chome, Naka-ku, Nagoya-sh, Aichi 03, JP)
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