Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/188294
Kind Code:
A1
Abstract:
A charged particle beam device comprising an aberration corrector having a transmission lens disposed between a first multipole and a second multipole in order to correct five-fold symmetric fourth-order astigmatism (A4) while maintaining four-fold symmetric third-order astigmatism (A3) correction, said charged particle beam device being characterized by: additionally comprising a first deflector that adjusts an angle θ1 between a charged particle beam incident on the first multipole and the optical axis, a second deflector that adjusts an angle θ2 between a charged particle beam incident on the second multipole and the optical axis, and a control unit that controls the first deflector and the second deflector; and the control unit changing the angle θ1 so as to correct five-fold symmetric fourth-order astigmatism, and changing the angle θ2 so as to correct four-fold symmetric third-order astigmatism that occurs due to the change in the angle θ1.
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Inventors:
TAKASAKI MIHIRO (JP)
TAMAKI HIROKAZU (JP)
TAMAKI HIROKAZU (JP)
Application Number:
PCT/JP2022/016592
Publication Date:
October 05, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/153
Foreign References:
| JP2014194982A | 2014-10-09 | |||
| JP2021082593A | 2021-05-27 | |||
| US20040004192A1 | 2004-01-08 |
Attorney, Agent or Firm:
POLAIRE I.P.C. (JP)
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